|
高穩(wěn)定性的質(zhì)量流量計－氣體流量控制不受上流和下流端壓力變化的影響。不同壓力感測，采用壓力鈍感模式
-
采用不同壓力感測即鈍感模式
-
縮小氣體柜的體積（不再需要壓力傳感器，調(diào)壓閥和過濾器）
-
流量控制量程范圍廠
-
精度高
-
提高產(chǎn)能－可以提供標(biāo)準(zhǔn)流量給半導(dǎo)體制程。
|
|
D212
|
|
Maximum Full-Scale (N2)
|
10 / 20 / 30 / 40sccm
|
50sccm ~ 10slm
|
|
Operating Inlet Pressure
|
14kPa (g) ~ 350kPa (g)
|
250kPa(g) ~ 350kPa(g)
|
|
Maximum Outlet Pressure
|
≤13.3kPa (a)
|
≤53.3kPa (a)
|
≤13.3kPa(a)
|
≤53.3kPa(a)
|
|
Accuracy under Digital mode
(per SEMI Standard E56-1296)
|
±1% S.P.
(35 ~ 100%)
±0.35% F.S.
(2.5 ~ 35%)
|
±1% S.P.
( 50 ~ 100%)
±0.5% F.S.
(30 ~ 50%)
|
±1% S.P.
( 5 ~ 100%)
±0.05% F.S.
(0.5 ~ 5%)
|
±1% S.P.
( 10 ~ 100%)
±0.1% F.S.
(2 ~ 10%)
|
|
Control Range under Digital mode (% F.S.)
|
2.5% ~ 100%
|
30 ~ 100%
|
0.5 ~ 100%
|
2 ~ 100%
|
|
Recommended Re-Zero Term
|
once/ year
|
|
Valve Type (PIEZO)
|
Normally Close
|
|
Linearity
|
±0.5% F.S.
|
|
Repeatability
|
±0.3% S.P. ( 10~100%)
±0.03% F.S. ( <10%)
|
|
Response Time
|
800 msec.
|
|
Proof Pressure
|
500kPa(g)
|
|
Burst Pressure
|
1MPa(g)
|
|
Leak Integrity
|
<5×10-12 Pa·m3/s (He)
|
|
Wetted Materials
|
SUS-316L , INCONEL
|
|
Operating Temperature
|
15 ~ 45°C
|
|
Flow Rate Setting Signal
|
0 ~ 5VDC or RS485 F-NET Protocol
|
|
Flow Rate Output Signal
|
0 ~ 5VDC or RS485 F-NET Protocol
|
|
Power Requirement
|
± 15V ± 5%, 150 mA
|
|
Fittings
|
1.125inch width 1/4VCR , C-seal , W-seal
|
|
Installation Orientation
|
Attitude Insensitive
|
|
|
D214
|
|
Maximum Full-Scale (N2)
|
10 / 20 / 30 / 40sccm
|
50sccm ~ 10slm
|
|
Operating Inlet Pressure
|
14kPa (g) ~ 350kPa (g)
|
250kPa(g) ~ 350kPa(g)
|
|
Maximum Outlet Pressure
|
≤13.3kPa (a)
|
≤53.3kPa (a)
|
≤13.3kPa(a)
|
≤53.3kPa(a)
|
|
Accuracy under Digital mode
(per SEMI Standard E56-1296)
|
±1% S.P. (35 ~ 100%)
±0.35% F.S. (2.5 ~ 35%)
|
±1% S.P. ( 50 ~ 100%)
±0.5% F.S. (30 ~ 50%)
|
±1% S.P. ( 5 ~ 100%)
±0.05% F.S. (0.5 ~ 5%)
|
±1% S.P. ( 10 ~ 100%)
±0.1% F.S. (2 ~ 10%)
|
|
Control Range under Digital mode
|
2.5% ~ 100% F.S.
|
30 ~ 100% F.S.
|
0.5 ~ 100% F.S.
|
2 ~ 100% F.S.
|
|
Recommended Re-Zero Term
|
once/ year
|
|
Valve Type (PIEZO)
|
Normally Close
|
|
Linearity
|
±0.5% F.S.
|
|
Repeatability
|
±0.3% S.P. ( 10~100%)
±0.03% F.S. ( <10%)
|
|
Response Time
|
800 msec.
|
|
Proof Pressure
|
500kPa(g)
|
|
Burst Pressure
|
1MPa(g)
|
|
Leak Integrity
|
<5×10 -12 Pa·m 3 /s (He)
|
|
Wetted Materials
|
SUS-316L , INCONEL
|
|
Operating Temperature
|
15 ~ 45°C
|
|
Flow Rate Setting Signal
|
Device Net
|
|
Flow Rate Output Signal
|
Device Net
|
|
Power Requirement
|
11~25VDC 4VA
|
|
Fittings
|
1.125inch width 1/4VCR , C-seal , W-seal
|
|
Installation Orientation
|
Attitude Insensitive
|
|
NOTE
|
|
|
There are special variations for low inlet pressure condition. Please contact our local office if you have request / any questions about it.
|
|